Combinatorial approach for ferroelectric material libraries prepared by liquid source misted chemical deposition method

1. 

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   Fig. 1.

   Structural analysis by using microbeam XRD. (A) The microbeam XRD spectra of BLCT thin-film samples on the library as a function of La content, x. These spectra were scanned in θ-2θ type in the range of 2θ between 17 and 53° under Cu Kα radiation (λ = 1.5405 Å) operated at 40 mA and 40 kV. (B) The ratio of instensity of (117) diffraction peak to that of Pt (111) diffraction peak was plotted as a function of La content.

   
   
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   Fig. 2.

   The surface morphology of BLCT thin films as a function of La content. x = 0 (A), x = 0.08 (B), x = 0.17 (C), and x = 0.25 (D) in BLCT combinatorial array, where x is La content.

   
   
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   Fig. 3.

   The characterization of P–E characteristic using a ferroelectric tester (RT66A). The plot of 2P _r of BLCT thin-film samples on the library as a function of La content, x. Pt top electrodes of 200 μm diameter were deposited on the thin-film library by using RF-sputtering system to fabricate the capacitor structure for measuring the remanent polarization. The thickness of top electrode was ≈100 nm.

   
   
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   Fig. 4.

   Fatigue endurance behavior of BLCT thin film samples (x = 0.014, 0.172, 0.194). The frequency was 1 MHz, and applied voltage was ± 5 V. Only these compositions were tested because of long test time.

   
   
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   Fig. 5.

   Confirmation of the reliability of combinatorial experimentation by using LSMCD process. (A) The comparison of 2P _r of BLCT samples deposited by combinatorial experimentation with that of BLCT samples deposited individually (one sample at one time). (B) P–E hysteresis loop of BLCT samples chosen among the BLCT library. (C) P–E hysteresis loop of BLCT fabricated individually at the same condition.

   
   
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   Fig. 6.

   Mapping of topographic deformation using the SPM. (A) The schematic drawing of measuring topographic deformation by using SPM. (B) The topographic deformation of samples detected by SPM. Detection time was 1 s per point and DC voltage was changed continuously from −10 V and 10 V. A 2 μm × 2 μm region of each library was scanned with a gold-coated AFM tip. (C) The plot of topographical deformation (H = H1 + H2) and 2P _r of BLCT thin-film samples on the library as a function of La content.