Table 2.

Summary of mechanical parameters of cantilever beams at various stages of the biosensing analysis, in which protein attachment scheme 1 was used

Cantilever numberLC, length of cantilever, μmWC, width, μmωr, unloaded natural frequency, MHzUnloaded quality factorkC, unloaded linear spring constant, N/mkC+A, spring constant after composite protein attachment, N/mΔωrA, measured change in resonant frequency after composite protein attachment, kHzCalculated minimum detectable frequency shift to measure composite protein attachment, kHzΔωrB, measured change in resonant frequency after virus capture, kHzCalculated minimum detectable frequency shift to measure virus capture, kHz
SE_N13.11.72.4077.280.01800.0160−376521550
SE_N63.01.72.1618.380.01730.0190−23647−5638
SE_N72.81.82.4396.250.01420.0160−8764−6354
SE_N2a2.81.62.2375.880.01100.0160−17972−2745
SE_N32.91.62.2466.320.01250.0162−123657647
SE_N4a2.51.63.24213.050.03660.0281−233323138
S5_N1a3.41.52.6336.110.01730.0220−9769−6751
S5_N2a3.31.52.7517.700.02320.0320−19557−129*35
S5_N43.31.42.1464.890.01140.0197−23370−66*31
S5_N6a3.11.42.9306.870.02270.0330−22368−112*39
S5_N2b4.31.51.2277.950.00850.009411225−4327
SE_N4b3.11.81.8318.050.01380.01658249−1744
SE_N52.81.62.3639.770.02010.020232442−6649
S5_N53.31.41.7677.230.01310.02025539−5127
SE_N2b3.21.71.93310.170.01950.019310838−484*41
S5_N1b4.31.31.2785.920.00620.01148134−71*22
S5_N35.01.51.2648.230.00910.013313224−58*21
S5_N5b4.51.51.2566.280.00690.012363332−132*45
S5_N6b4.51.71.3096.570.00760.01144932−104*23
S5_N74.71.31.3005.910.00720.01332835−60*20
  • Lengths and widths were obtained through measurements using field emission scanning electron micrographs. Measured changes in resonant frequency after the virus capture step marked with asterisks are two times larger than the calculated minimum detectable frequency shift.